Dependence of Sputtering and Oxidation on the Crystal Orientation of Tungsten

Wall Forum

  • Date: Dec 5, 2018
  • Time: 03:30 PM - 04:30 PM (Local Time Germany)
  • Speaker: Karsten Schlüter
  • IPP / E2M
  • Location: Garching
  • Room: Seminarraum D3
  • Host: IPP
A method will be introduced to combine electron backscatter diffraction data from a scanning electron microscope and height profile data from a confocal laser scanning microscope. Oxidation and sputter experiments of tungsten were performed and results will be presented.
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