Grain-dependent sputtering - A method to detect the impact angle of the ions

Wall Forum

  • Date: Apr 22, 2020
  • Time: 03:30 PM - 04:30 PM (Local Time Germany)
  • Speaker: Karsten Schlüter
  • Location: Zoom
  • Host: IPP
A method will be introduced to evaluate ten thousand of different single-crystal-grains and correlate the crystal orientation to sputter yields, secondary electron emissions and EDX (energy dispersive X-ray spectroscopy) data. With the method, gallium sputtering is described in "every" crystal orientation of the target tungsten. Also, a comparison will be shown between MD (molecular dynamic) simulations, BCA (binary collision approximation) simulations and the experimental data. Due to the huge amount of data, it is possible to evaluate the impact angle of the ion through Principal Component Analysis (PCA), which could be used as a detector.
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