Publications of M. Engelhard

Journal Article (2)

1.
Journal Article
Engelhard, M.; Jacob, W.; Moller, W.; Koch, A. W.: New Calibration Method for the Determination of the Absolute Density of CH Radicals through Laser-Induced Fluoroescence. Applied Optics 34 (21), pp. 4542 - 4551 (1995)
2.
Journal Article
Jacob, W.; Engelhard, M.; Möller, W.; Koch, A.: Absolute density determination of CH radicals in a methane plasma. Applied Physics Letters 64 (8), pp. 971 - 973 (1994)

Book Chapter (1)

3.
Book Chapter
Koch, A.; Clausing, R.E.; Engelhard, M.; Horton, L.L.; Jacob, W.; Angus, J.C.; Moeller, W.; Koidl, P.; Wilhelm, R.: In Situ Plasma and Surface Diagnostics of C:H Deposition from ECR Plasmas. In: Diamond and Diamond-Like Films and Coatings, Vol. 266, pp. 281 - 288. Plenum Press (1991)

Conference Paper (1)

4.
Conference Paper
Engelhard, M.; Jacob, W.; Moeller, W.: Absolute CH Radical Density Measurements in an ECR Methane Plasma. In: 11th International Symposium on Plasma Chemistry. Symposium Proceedings, pp. 1392 - 1397 (Ed. Harry, J. E.). 11th International Symposium on Plasma Chemistry (ISPC 11), Loughborough, August 22, 1993 - August 27, 1993. (1993)

Thesis - PhD (1)

5.
Thesis - PhD
Engelhard, M.: Messung und Modellierung absoluter Radikaldichten in einem ECR-Methanplasma. Dissertation, Max-Planck-Institut für Plasmaphysik, Garching (DE) (1993)

Report (2)

6.
Report
Engelhard, M.: Messung und Modellierung absoluter Radikaldichten in einem ECR-Methanplasma. Max-Planck-Institut für Plasmaphysik, Garching (DE) (1993), 125 pp.
7.
Report
Manso, M. E.; Serra, F.; Silva, A.; Matias, J.; Nunes, F.; Neves, J.; Pereira, J.; Siller, G.; Söldner, F. X.; Schubert, R. et al.; Hübner, K.; Bätzner, R.; Hinsch, H.; Ingrosso, L.; Klein, R.; van Calker, C.; Robouch, B. V.; Brzosko, J. S.; Kucinski, J.; Bomba, B.; Bosch, H. S.; Wolle, B.; Chu, C.-C.; Hofmann, J. V.; Mertens, V.; Hartfuss, H. J.; Kurzan, B.; Steuer, K.-H.; Loch, R.; Engelhard, M.; Hartinger, T.; Müller, E. R.; Büchse, R.: Development of Diagnostics and Data Analysis on ASDEX in 1989. Max-Planck-Institut für Plasmaphysik, Garching (DE) (1990), 29 pp.
Go to Editor View