Publications of P. Reinke

Journal Article (4)

1.
Journal Article
Jacob, W.; Reinke, P.; Möller, W.: Ion energy distributions from electron cyclotron resonance methane plasmas. Diamond and Related Materials 2 (2-4), pp. 378 - 382 (1993)
2.
Journal Article
Reinke, P.; Jacob, W.; Moeller, W.: The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon Films. Journal of Applied Physics 74, 2, pp. 1354 - 1361 (1993)
3.
Journal Article
Reinke, P.; Jacob, W.; Möller, W.: Influence of the ion energy on the growth and structure of thin hydrocarbon films. Journal of Applied Physics 74 (2), pp. 1354 - 1361 (1993)
4.
Journal Article
Reinke, P.; Schelz, S.; Jacob, W.; Möller, W.: Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films 10 (3), pp. 434 - 438 (1992)

Conference Paper (2)

5.
Conference Paper
Reinke, P.; Jacob, W.; Moeller, W.: Investigation of the Growth Mechanism of C:H Films from ECR Plasma. In: 11th International Symposium on Plasma Chemistry. Symposium Proceedings, pp. 823 - 828 (Ed. Harry, J. E.). 11th International Symposium on Plasma Chemistry (ISPC 11), Loughborough, August 22, 1993 - August 27, 1993. (1993)
6.
Conference Paper
Reinke, P.; Jacob, W.; Moeller, W.: Ion Energy Distribution at the Substrate in an ECR-Reactor. In: Diamond and Diamond-like Films and Coatings. Proceedings of a Nato Advanced Study Institute, pp. 661 - 667 (Eds. Clausing, R. E.; Angus, J. C.; Koidl, P.). Diamond and Diamond-like Films and Coatings, Castelvecchio Pascoli (IT), July 22, 1990 - August 03, 1990. Plenum Press, New York, NY (1991)

Report (1)

7.
Report
Reinke, P.: Ionenenergieverteilungen aus einem ECR-Plasma und ihr Einfluß auf das Schichtwachstum von C:H-Schichten. Max-Planck-Institut für Plasmaphysik, Garching (DE) (1992), 130 pp.
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