Publikationen von M. Meier
Alle Typen
Zeitschriftenartikel (9)
2003
Zeitschriftenartikel
74 (12), S. 5123 - 5136 (2003)
Particle-beam experiment to study heterogeneous surface reactions relevant to plasma-assisted thin film growth and etching. Review of Scientific Instruments
Zeitschriftenartikel
5, 133 (2003)
Interaction of CH3 and H with amorphous hydrocarbon surfaces: estimation of reaction cross sections using Bayesian probability theory. New Journal of Physics
Zeitschriftenartikel
43 (1), S. 25 - 29 (2003)
Consequences of the temperature and flux dependent sticking coefficient of methyl radicals for nuclear fusion experiments. Nuclear Fusion
Zeitschriftenartikel
71 (3), S. 361 - 376 (2003)
Can plasma experiments unravel microscopic surface processes in thin film growth and erosion? Implications of particle–beam experiments on the understanding of a-C:H growth. Vacuum 2002
Zeitschriftenartikel
116 (12), S. 5125 - 5136 (2002)
Temperature dependence of the sticking coefficient of methyl radicals at hydrocarbon film surfaces. Journal of Chemical Physics
Zeitschriftenartikel
11, S. 969 - 975 (2002)
Growth mechanism of amorphous hydrogenated carbon. Diamond and Related Materials 2001
Zeitschriftenartikel
90 (7), S. 3585 - 3594 (2001)
Hydrogen Elimination as a Key Step for the Formation of Polymerlike Hydrocarbon Films. Journal of Applied Physics 2000
Zeitschriftenartikel
76, S. 676 - 678 (2000)
Direct Identification of the Synergism between Methyl Radicals and Atomic Hydrogen during Growth of Amorphous Hydrogenated Carbon Films. Applied Physics Letters
Zeitschriftenartikel
Interaction of CH3 and H with Amorphous Hydrocarbon Surfaces: Dependence of Elementary Reaction Cross Sections on the Angle of Incidence.
Buchkapitel (1)
2005
Buchkapitel
Interaction of Low-Energy Ions and Hydrocarbon Radicals with Carbon Surfaces. In: Nuclear Fusion Research: Understanding Plasma-Surface Interactions, S. 249 - 285 (Hg. Clark, R. E. H.; Reiter, D. H.). Springer, Berlin (2005)
Konferenzbeitrag (3)
2003
Konferenzbeitrag
Assessment of Ion Surface Scattering (ISS) as in-situ real-time diagnostic tool in low temperature plasmas. In: Workshop Frontiers in Low Temperature Plasma Diagnostics V, S. 126 - 129 (Hg. DeBenedictis, S.; Dilecce, G.). Frontiers in Low Temperature Plasma Diagnostics V, Specchia (IT), 03. April 2003 - 07. April 2003. Organizing Comittee Workshop FLTPDV-Bari-Italy, Specchia (2003)
2001
Konferenzbeitrag
Formation of Polymer-Like Hydrocarbon Films from Radical Beams of Methyl and Atomic Hydrogen. In: Proceedings of the 15th International Symposium on Plasma Chemistry, S. 239 - 244 (Hg. Bouchoule, A.). 15th International Symposium on Plasma Chemistry, Orleans, 2001. CNRS (2001)
Konferenzbeitrag
Fundamental Growth Mechanisms during PECVD of Carbon Thin Films. 13th International Colloquium on Plasma Processes, Antibes, 10. Juni 2001 - 14. Juni 2001. CIP'2001 proceedings, S. 137 - 141 (2001)
Vortrag (3)
2003
Vortrag
Elementary Surface Processes during Growth and Erosion of Amorphous Hydrogenated Carbon Films. 5th Meeting on Diamond, Amorphous Carbon, Nanotubes and Related Materials, Rio de Janeiro (2003)
Vortrag
Chemical Sputtering of Hydrocarbon Layers. ASEVA Workshop 14: Reactive Plasmas - Physical and Chemical Processes in Reactive Hydrocarbon Plasmas in Contact with Surfaces, Avila (2003)
Vortrag
Elementary Surface Processes during Growth of a-C:H Films. ASEVA Workshop 14: Reactive Plasmas - Physical and Chemical Processes in Reactive Hydrocarbon Plasmas in Contact with Surfaces, Avila (2003)
Poster (1)
2003
Poster
Deposition of hydrogenated carbon films from nitrogen containing methane plasmas. 10th International Workshop on Carbon Materials for Fusion Application, Jülich (2003)
Hochschulschrift - Doktorarbeit (2)
2002
Hochschulschrift - Doktorarbeit
Elementare Mechanismen bei der Wechselwirkung von Methylradikalen und Wasserstoffatomen mit der Oberfläche amorpher Kohlenwasserstofffilme. Dissertation, 104 S., Universität Bayreuth, Bayreuth (2002)
Hochschulschrift - Doktorarbeit
Elementare Mechanismen bei der Wechselwirkung von Methylradikalen und Wasserstoffatomen mit der Oberfläche amorpher Kohlenwasserstoff-Filme. Elementary Mechanisms During Interactions of Methyl Radicals and Hydrogen Atoms with the Surface of Amorphous Hydrocarbon Films. Dissertation, 132 S., Universität Bayreuth, Bayreuth (2002)
Bericht (1)
2002
Bericht
Elementare Mechanismen bei der Wechselwirkung von Methylradikalen und Wasserstoffatomen mit der Oberfläche amorpher Kohlenwasserstoff-Filme. Elementary Mechanism During Interaction of Methyl Radicals and Hydrogen Atoms with the Surface of Amorphous Hydrocarbon Films. Max-Planck-Institut für Plasmaphysik, Garching (2002), 132 S.