Publikationen von W. Möller
Alle Typen
Zeitschriftenartikel (81)
1995
Zeitschriftenartikel
Running discharge for PECVD inner coating of metal tubes. Surface & Coatings Technology (1-3), S. 43 - 48 (1995)
Zeitschriftenartikel
34 (4B), S. 2163 - 2171 (1995)
Mechanisms of the Deposition of Hydrogenated Carbon Films. Japanese Journal of Applied Physics Part 1: Regular Papers, Short Notes & Review Papers 1994
Zeitschriftenartikel
65 (9), S. 2882 - 2889 (1994)
In situ characterization of plasma‐deposited a‐C:H thin films by spectroscopic infrared ellipsometry. Review of Scientific Instruments
Zeitschriftenartikel
64 (25), S. 3401 - 3403 (1994)
Running waveguide discharge for inner coating of metal tubes. Applied Physics Letters
Zeitschriftenartikel
64 (8), S. 971 - 973 (1994)
Absolute density determination of CH radicals in a methane plasma. Applied Physics Letters
Zeitschriftenartikel
75 (12), S. 7718 - 7727 (1994)
A combined plasma‐surface model for the deposition of C:H films from a methane plasma. Journal of Applied Physics
Zeitschriftenartikel
89 (1-4), S. 322 - 324 (1994)
Computer simulation of ion-beam assisted film growth. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Zeitschriftenartikel
130, S. 353 - 366 (1994)
Modeling of ion-assisted deposition using BCA computer simulation. Radiation Effects and Defects in Solids
Zeitschriftenartikel
129 (1-2), S. 19 - 23 (1994)
Capabilities of dynamic BCA simulations. Radiation Effects and Defects in Solids 1993
Zeitschriftenartikel
11 (5), S. 2508 - 2517 (1993)
Moving‐coil waveguide discharge for inner coating of metal tubes. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films
Zeitschriftenartikel
63 (13), S. 1771 - 1773 (1993)
On the structure of thin hydrocarbon films. Applied Physics Letters
Zeitschriftenartikel
2 (2-4), S. 378 - 382 (1993)
Ion energy distributions from electron cyclotron resonance methane plasmas. Diamond and Related Materials
Zeitschriftenartikel
2 (2-4), S. 251 - 254 (1993)
Deposition of dense C:H films at elevated substrate temperature. Diamond and Related Materials
Zeitschriftenartikel
62 (9), S. 937 - 939 (1993)
Deposition of dense hydrocarbon films from a nonbiased microwave plasma. Applied Physics Letters
Zeitschriftenartikel
56 (6), S. 527 - 546 (1993)
Plasma and surface modeling of the deposition of hydrogenated carbon films from low-pressure methane plasmas. Applied Physics A - Materials Science & Processing
Zeitschriftenartikel
56 (6), S. 469 - 469 (1993)
Plasma-Enhanced Chemical-Vapor-Deposition. Applied Physics A - Materials Science & Processing
Zeitschriftenartikel
228 (1-2), S. 319 - 325 (1993)
Modelling and computer simulation of ion-beam- and plasma-assisted film growth. Thin Solid Films
Zeitschriftenartikel
74, 2, S. 1354 - 1361 (1993)
The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon Films. Journal of Applied Physics
Zeitschriftenartikel
74 (2), S. 1354 - 1361 (1993)
Influence of the ion energy on the growth and structure of thin hydrocarbon films. Journal of Applied Physics
Zeitschriftenartikel
Ion stimulated densification of amorphous carbon films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, S. 1507 - 1510 (1993)